Title: Method for preparing wave guide and grating structure of adjustable distributive feedback quantum cascade laser and above said grating
Application Number: 200610030991 Application Date: 2006.09.08
Publication Number: 1945910 Publication Date: 2007.04.11
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01S5/12;H01S5/20;H01S5/343;H01S5/00
Applicant(s) Name: Shanghai Inst. of Microsystem and Information Tech Address:
Inventor(s) Name: Xu Gangyi;Li Yaoyao;Li Aizhen
Attorney & Agent:
Abstract:
    This invention relates to a waveguide and a grating structure of an adjustable distribution feed back quanta cascade laser obtaining low threshold value current density and high side mode suppression ratio and a method for preparing first order grating of laser meeting the requirement, in which, the laser waveguide and the grating structure is a limit structure in the waveguide made up of a deep first order grating and a thin heavy doped semiconductor layer, said grating corrosion technology is to utilize the InGaAs/InP structure as the corrosion sacrificial layer of the grating and select different corroding liquid matches to get a grating structure with the depth adjustable and accuracy controllable.
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