Title: Thin film SnO2 gas-sensitive element and manufacturing method
Application Number: 85100030 Application Date: 1985.04.01
Publication Number: 1001080 Publication Date: 1986.06.10
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01L49/02
Applicant(s) Name: Zhang Weixin, Xu Buhua, Hou Zengyi Address:
Inventor(s) Name: Hou Zengyi, Xu Buhua
Attorney & Agent: LIU ZHIGANG WANG GUOXIN
Abstract:
     The heating film of the thin film gas sensitive element is SnO2 film, contained a certain quantity antimony and the sensitive film is also SnO2 film. The element has stability performance and high replaceability. The elemet can be made by convenient process with satisfactory repetitiveness, and by simple apparatus. The productivity is high and production cost is low.
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