Title: Single source vacuum deposit method to make vario-refraction-index film
Application Number: 85100569 Application Date: 1985.04.01
Publication Number: 1001326 Publication Date: 1986.07.02
Approval Pub. Date: Granted Pub. Date: 1989.03.01
International Classifi-cation: C23C14/00,H01L21/203
Applicant(s) Name: Nanjing Polytechnic College Address:
Inventor(s) Name:
Attorney & Agent: LOU GAOCHAO KE JINGFENG
Abstract:
     This invention is a physical vacuum evaporation method to make vario-refrachion-index film on base material. The key to this problem is the manufacture of base material and the application of zone heating technic with single electron bundle. Compared with chemical method, advantage of this plysical method is greater degree of freedom.
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