Title: Interface apparatus for automatic test equipment
Application Number: 95115593 Application Date: 1995.08.25
Publication Number: 1125898 Publication Date: 1996.07.03
Approval Pub. Date: 2003.07.02 Granted Pub. Date: 2003.07.02
International Classifi-cation: G01R31/26;G01R31/28;H01L21/66
Applicant(s) Name: Advanced Engineering Systems Operations Address:
Inventor(s) Name: Alexander H. Slocum;Michael A. Chiu
Attorney & Agent: YU MENG
Abstract:
    The invention provides an interface operates between a test head of an automatic testing device and a handling device such as a prober. The interface bas a preloaded dynamic coupling between the test head and the handling device and between a probe card and the test head. The coupling relatively and repeatedly positions the probe card for an element in the handling device. The coupling also reduces force operated on the probe card and prevents the probe card from being deformed. The interface provides mechanical and electrical loops whose mechanical accuracy does not depend on an electrical structure.
Time: 10