Title: Liquid filling method of drop spray nozzle and spray device, photoelectric device manufacturing method
Application Number: 03107253 Application Date: 2003.03.19
Publication Number: 1445087 Publication Date: 2003.10.01
Approval Pub. Date: 2005.10.05 Granted Pub. Date: 2005.10.05
International Classifi-cation: B41J2/00;G02F1/00;H01J9/00;G02B5/00;G02B3/00;G03F7/16
Applicant(s) Name: Seiko Epson Corp. Address:
Inventor(s) Name: Nakamura Shinichi
Attorney & Agent: li xianglan
Abstract:
    The invention provides a method for filling functional liquid liquid drop ejection and ejectoin unit. To obtain a unit for filling an inner channel of a liquid ejection head with liquid in a liquid supply tank 126 through suction of a suction pump 153 acting through a cap, when a plurality of caps 212 of a cap unit 34 are applied tightly to a plurality of liquid drop ejection heads 7 mounted on the head unit, in which bubbles can be removed efficiently from the inner channel of the head by increasing current velocity at the time of filling. A branch passage 158b for liquid supply being connected individually with each liquid drop ejection head 7 is provided with an on/off valve 166, and a branch passage 216b for suction being connected individually with each cap 212 is provided with a liquid sensor 217. At the time of filling the channel with liquid, a corresponding on/off valve 166 is closed temporarily when the liquid reaches the liquid sensor 217.
Time: 14