Title: Optical performance restoring equipment, restoring method and optical system used for the equipment
Application Number: 200410046441 Application Date: 2004.05.31
Publication Number: 1704180 Publication Date: 2005.12.07
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B08B7/00,C03C23/00,H01J61/00,G03F7/20,H01L21/027
Applicant(s) Name: Mitsubishi Heavy Industries Ltd. Address:
Inventor(s) Name: Danno Minoru, Futami Hiroshi, Kuribayashi Shitozan
Attorney & Agent: liu xiaofeng
Abstract:
     The invention relates to an optical device which can prevent or depress the wane of optical system which designed the life of optical device. It can achieve the effect such as optical transmission, optical diffraction, optical reflection, spectrum generation, optical impulsion and its combination. It has the following steps: generating near-empty space with active energy to excite the oxidizing reaction of carbon, wherein the said near-empty space is opposed faced to the surface of optical system; the said near-empty space generates negative ion or group such as unstable group with oxygen atom like OH group, OH.-. ion, ozone, O.2..-. ion and O.-. group.
Time: 20