Title: Process for manufacturing micro-foil resistance strain gauge
Application Number: 85100133 Application Date: 1985.04.01
Publication Number: 1002230 Publication Date: 1986.08.06
Approval Pub. Date: Granted Pub. Date: 1989.07.12
International Classifi-cation: G01B7/20,H01C17/00,H05K3/06
Applicant(s) Name: Qinghua Univ. Address:
Inventor(s) Name: Feng Renxian, Lu Fucong
Attorney & Agent: ZHANG XIUZHEN
Abstract:
     In this process, the sensing grate is formed by means of photolithography with positive photoresist, a ball mercury lamp is used as the light source of exposure, the solution comprising 0.8-12% potassium hydroxide is used as developer, the base film is centrifugally formed, the solution comprising 55-60deg.C (Baume) FeCl3 is used as etching liquid. The pattern is etching out once. By using the process, a constantan sensing grate with the width of the strip-grate less than 10 micron can be made so as to make the micro-foil resistance strain gauge with 2 mm square in the base dimension, 0.5mm square in the dimension of sensing grate, 0.5 mm in the length of sensing grate, 120 ohm of resistance and ability for delivering deformation in the range of 1X(10 to the power -2) to 2X(10 to the power -2). It can be used for analysing and measuring stress and as sensitive element for micro sensor.
Time: 10