Title: Film resistance temp. sensor and manufacturing method
Application Number: 88102279 Application Date: 1988.04.18
Publication Number: 1022552 Publication Date: 1988.11.30
Approval Pub. Date: Granted Pub. Date: 1990.12.26
International Classifi-cation: G01K7/16,H01C7/02
Applicant(s) Name: Huadong Normal Univ. Address:
Inventor(s) Name:
Attorney & Agent: YU YUNCHAO
Abstract:
     The said temp. sensor is one of the electronic solid sensor. In order that the said sensor is small and has a wide operating temp. range and high sensitivity. It uses double-layered Ti-Al film structure and fine pattern design and process technology. The temp. sensor is packed in a small metallic shell, and it has a resistance of 130-600 ohms with a positive resistance temp. coefficient about 0.0042/deg.C. It may be used in the temp. range of -200 to 200 deg.C with a linearity below 0.5%.
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