Title: Production process of humidity sensor element formed with the ceramic of compact texture
Application Number: 89101503 Application Date: 1989.03.15
Publication Number: 1045662 Publication Date: 1990.09.26
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01N27/02,H01C7/00,H01L49/00
Applicant(s) Name: Shanghai Silicate Inst., Chinese Academy of Scienc Address:
Inventor(s) Name: Feng Baokang, Wang Lie'e
Attorney & Agent: PAN ZHEN NIE SHUYI
Abstract:
     This invention relates to a ceramic dew cell whose components are KxNaxBi(1-x-y)TiO3 and small quantity of additive, where x and y is equal to 0.005-0.495. the dew cell with compact structure has an outstanding feature that it has higher time stability (drift per year is less than 5% RH) and better power to resist environmental pollution without thermal washing it. Its humidity-sensitive temp. coefficient at the temp. greater than 25 deg.C is small (is less than 0.1% RH, deg.C), so it is unnecessary to do temp. compensation. Other advantages include high sensitivity (Z20% RH/Z 99% RH=about 10 to the power 3), moderate negative value, smaller wet band and good technological repeatability. In addition, this device does not use noble metals (such as Au or RuO2) as its electrode and leading wire, so having simple structure and low cost.
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