| Title: | Fabrication of humidity sensor made of oxide ceramic membrane | ||
| Application Number: | 90105409 | Application Date: | 1990.01.23 |
| Publication Number: | 1053706 | Publication Date: | 1991.08.07 |
| Approval Pub. Date: | Granted Pub. Date: | 1993.05.05 | |
| International Classifi-cation: | H01C7/00,H01L49/00 | ||
| Applicant(s) Name: | Changsha Inst. of Mining | Address: | 410012 |
| Inventor(s) Name: | |||
| Attorney & Agent: | CHEN KAIYAO | ||
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Abstract: |
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| The production of humidity-dependent components are that the silicate ceramic of stratified or chain structure and containing Mg, Al, Fe, Ti and other elements is added with proper additive and mixed into humidity-dependent pulp and that the pulp is painted on the substrate with comb electrodes and heat-treated. The humidity-dependent components produced have good properties in 0-100% RH, and thus may be widely used for humidity measurement and control at high and room temperature. | |||
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| Time: | 8 | ||
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