Title: Electric Insulation thin layer
Application Number: 85101843 Application Date: 1985.04.01
Publication Number: 1006812 Publication Date: 1987.01.10
Approval Pub. Date: Granted Pub. Date: 1991.01.02
International Classifi-cation: C23C14/06,C23C16/22,H01B3/00,H01L21/00
Applicant(s) Name: Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Address:
Inventor(s) Name: Kazunori Tsuge, Kunio Nishimura, Takehisa Nakayama
Attorney & Agent: LI XIANCHUN XIAO JUCHANG
Abstract:
     An electric insulation thin layer comprising a non-monocrystalline substance, being deposited on a substrate by means of a plasma CVD method or a spatter method, and having a carbon content of not less than 10 by atom. The electric insulation layer is thinner and has an excellent heat resistance and a high dielectric breakdown voltage.
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