Title: Apparatus and method for multiple and continuous growing of chloride and hydrogenate systems with sources
Application Number: 86104675 Application Date: 1986.07.10
Publication Number: 1016049 Publication Date: 1988.01.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C30B25/02
Applicant(s) Name: Yang Ren Address:
Inventor(s) Name:
Attorney & Agent:
Abstract:
     In order to improve the efficiency, epitaxial films taking-off and substrates filling-in are accomplished in a reactive tube under a condition of stable reaction, whereby permitting the multiple and continuous growth and thus eliminating both an additional stage required between every growth in favour of film growth and repetition of a batch, and simultaneously the transition effects occurred in conventional methods that starting and stopping of epitaxy happened at a low mole number, where the compositions are subjected to changing.
Time: 7