Title: Method and apparatus for eliminating fractionation
Application Number: 86104713 Application Date: 1986.07.10
Publication Number: 1016095 Publication Date: 1988.01.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C30B31/18,H01L21/205,H01L21/223
Applicant(s) Name: Yang Ren Address:
Inventor(s) Name:
Attorney & Agent:
Abstract:
     This invention is relevant to a gas-phase chemical reaction using several liquid substances as raw materials, esp. to a field of the blended gas-phase chemical deposit technology. In order to eliminate fractionation, a liquid is supplemented to an evaporating solution from time to time, which is identical in composition and volume with that removed by the stream. This method is applicable to polybasic solutions, showing high stability and low-cost construction.
Time: 8