Title: Electrolytic-chemical joint corrosion method for copper pattern
Application Number: 92110057 Application Date: 1992.08.27
Publication Number: 1072464 Publication Date: 1993.05.26
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C23F1/02,C23F1/18,C25F3/14
Applicant(s) Name: Xi'an Jiaotong Univ. Address: 710049
Inventor(s) Name: Shu Xiaozhou, Yuan Suihua
Attorney & Agent: TIAN WENYING
Abstract:
     A method of etching copper patterns by combined electrolysis and chemical corrosion is disclosed. Anode is the copper workpiece which has been painted with photoetching latex, exposed, developed and enhanced the sturdiness of the coating. Cathode is a copper stock which has the similar shape of the workpiece. The patterns by electrolysis etching of the workpiece is carried out in cupric sulphate electrolyte. In a short period, most of the copper stock will be etched which should be etched. Then, the chemical corrosion of the workpiece is carried out in water-diluted solution of strong sulphuric acid and chromium trioxide to etch the remained copper stock which should be etched in a short time. This invention speeds up the conosion etching speed of the copper pattrns. Besides, it is easy to control and apply, side corrosion is small and the cost is reduced.
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