Title: Water-base electron cleaning agent
Application Number: 89106854 Application Date: 1989.11.11
Publication Number: 1051756 Publication Date: 1991.05.29
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C11D3/60,C23G5/036
Applicant(s) Name: Sun Qiji Address: 261041
Inventor(s) Name: Dai Qun, Ding Yongfa
Attorney & Agent:
Abstract:
     The water-based electronic cleaning liquor uses sodium ethylenediamine tetra-acetate and soluble fluoride compound as main components, surface active agent, such as alcohol ether and phenol ether, as detergent, ammonium soap and amide compound as synerpist, alcohols and deionized water as solvent. The weight percentages of above components are, sodium ethylenediamine tetra-acetate 0.1-1%, alcohol ether 6-15%, phenol ether 3-5%, alkyl alcohol amide 3-5%, triethyl alcohol amine oleate soap 5-10%, alcohols 1-5%, soluble fluoride compound 0.1-1%, deionized water 58-81.8%. The present product has better effect on surface cleaning of semiconductor material and device, and of glass and metal in film industry.
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