Title: Method resolving tin dioxide film
Application Number: 86100187 Application Date: 1986.01.10
Publication Number: 1012258 Publication Date: 1987.07.22
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C23F1/30,H01L21/302,H01L21/461,H01L31/18
Applicant(s) Name: Yunnan Normal Univ. Address:
Inventor(s) Name:
Attorney & Agent: MA YONGGANG
Abstract:
     This invention relates to a method for resolving the crystal film of tin dioxide, attached to the surface of backing material. Under normal temp. and pressure, the backing material attached by tin dioxide film is immersed in a prepared solution and processed, then it is quickly taken out of the solution and washed clearly by pure water. The solution is made according to following volume ratio: the concentrated hydrochloric acid-80-95%, the concentrated hydrofluoric acid-20-5% and the titanium filament is put into the solution according the ratio: 150-200 kilogram titanium filament per cubic metre of solution. The invention has following advantages: operating easily, resolving tin dioxide film quickly and completely, not corroding backing material and low cost.
Time: 6