Title: Vacuum coating using a cooler
Application Number: 85100062 Application Date: 1985.04.01
Publication Number: 1002184 Publication Date: 1986.08.06
Approval Pub. Date: Granted Pub. Date: 1988.04.20
International Classifi-cation: C23C14/54,F25B21/02
Applicant(s) Name: Qinghua Univ. Address:
Inventor(s) Name: Li Chunmao, Xu Zhizhi
Attorney & Agent: LIAO YUANQIU
Abstract:
     The present method is used in the vacuum coating technique where the coated work-piece must be cooled. Because a cooler is used, it has the advantages: smaller size, simpler structure, easier to operat and easier to assemble and disassemble, higher efficiency and lower-cost, as compared with the existing water or liquid nitrogen cooled systems. It is partic. useful for the vacuum coating technology where the coated work pieces are easily damaged by heating.
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