Title: Sputtering selective absorbing coat of solar energy and mfg. method
Application Number: 85100142 Application Date: 1985.04.01
Publication Number: 1001863 Publication Date: 1986.07.23
Approval Pub. Date: Granted Pub. Date: 1988.02.03
International Classifi-cation: C23C4/34,F24J2/48
Applicant(s) Name: Qinghua Univ. Address:
Inventor(s) Name:
Attorney & Agent: HU LANZHI
Abstract:
     In method of making the coat in sputtering chamber, a single cylindrical aluminum cathode is used. A aluminum film is sputtered in argon gas to use as a substrate, then the aluminum-nitrogen (or aluminum-carbon-oxygen) graded absorbing composition is deposited onto the substrate by reactive sputtering in argon-nitrogen (or argon-carbon monoxide) mixture gas and in pure nitrogen (or pure carbon monoxide) successively. The solar absorptivity and emissivity of the coat are 0.93 and 0.06 (100 deg.C) respectively. The feature of the coat is as good as that of the copper/metal-carbide coat made by sputtering process with double cathode made of copper and stainless steel respectively. This invention may simplify the structure of sputtering system and increase the sputtering efficiency. The coat can make the releasing amount of gas decrease and the temperature of vacuum baking in manufacture can be decrease to 400-450 deg.C. The production period can be shortened and energy dissipation is low.
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