Title: Dual light beams optical system for monitoring the thickness of optical coating
Application Number: 85101725 Application Date: 1985.04.01
Publication Number: 1002185 Publication Date: 1986.08.06
Approval Pub. Date: Granted Pub. Date: 1988.04.20
International Classifi-cation: C23C14/54,G01B11/06
Applicant(s) Name: Changchun Research Inst., of Precision Optical Mac Address:
Inventor(s) Name:
Attorney & Agent: LIU SHUQING
Abstract:
     The system is formally similar to the existing optical monitoring system which uses single receiver and single light path. The differences lie in: an equal dual-perforation light grating is set behind the angle-variable light filter (or monochrometer output slot), which splits a single light beam into two: one is the reference beam and the second the measurement beam; these two beams are separately modulated by a modulatory sector; and the holohedral dual-light beam optical system is formed. It makes the electronic system to solve easily the flatness of the baseline, drift, noise, hybrid light signal and magnetic field interference. Even influences of the sputtered film at the opening of vacuum chamber can be entirely eliminated.
Time: 8