Title: Glow discharge decomposing device
Application Number: 85104968 Application Date: 1985.06.29
Publication Number: 1006504 Publication Date: 1987.01.07
Approval Pub. Date: Granted Pub. Date: 1992.06.24
International Classifi-cation: C23C16/50
Applicant(s) Name: Kanegafuchi Chemical Industry Co. Ltd. Address:
Inventor(s) Name: Kiku Onigita, Masamochi Tai
Attorney & Agent: LI QIANG
Abstract:
     It has grounded pole, base pieces, RF-pole, radio frequency power, controlled circuitry with one electronic element at least, and matched circuitry. All of the base pieces are parallely amounted on grounded pole to be amounted on the RF pole. All of the RF poles are parallel and insulated each other; the matched circuitry receives radio frequency energy from radio frequency power; controlled circuitry receives radio frequency energy from matched circuitry and supplies RF-pole with radio frequency energy, the film is made on the base pieces by radio frequercy power which is independently controlled by the controlled circuitry.
Time: 6