Title: End-type multilayer interference filter
Application Number: 85106301 Application Date: 1985.08.21
Publication Number: 1009749 Publication Date: 1987.03.25
Approval Pub. Date: Granted Pub. Date: 1989.10.18
International Classifi-cation: C23C14/04,C23C14/24,G02B1/10,G02B5/28
Applicant(s) Name: Horiba Ltd. Address:
Inventor(s) Name: Masahiko Ishida
Attorney & Agent: LI QIANG
Abstract:
     The object of the invention is to improve the products, separation of multilayer films occuring at cutting edges is completely controlled as far as possible. According to the invention, on the substrate a mask which consists of hatches with required sizes is fitted. This prevents plating matters from being deposited on the part to be cut. The end-type multilayer interference filter of the invention can be used as detectors, e.g. a detector of infrared analysis instruments.
Time: 6