Title: Method of manufacturing tungsten perferentially orientated in the
Application Number: 85109258 Application Date: 1985.12.19
Publication Number: 1000975 Publication Date: 1986.06.10
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C22B5/16;C22B34/36;C23C16/08;C30B25/02
Applicant(s) Name: Gariner Georg, Janiel Peter Address:
Inventor(s) Name: Gariner Georg;Janiel Peter
Attorney & Agent: CAO HENGXING
Abstract:
    A process of reactive deposition from a gaseous phase containing tungsten hexafluoride and hydrogen on a substrate metal at an overall pressure of 10 to 10000 Pa (low-pressure CVD method) to prepare W
Time: 3