Title: Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
Application Number: 200610114834 Application Date: 2002.12.20
Publication Number: 1911937 Publication Date: 2007.02.14
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C07F7/21;C23C16/42;C23C16/448;C07B57/00
Applicant(s) Name: Air Prod Address:
Inventor(s) Name: Mayorga Steven G.;Xiao Manchao;Gaffney Thomas R.
Attorney & Agent: tan mengsheng liang mou
Abstract:
    The present invention is: (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a neutral to weakly acidic polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a neutral to weakly acidic polymerization inhibitor. A free radical scavenger can also be included in the process and composition.
Time: 8
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