Title: Zinc aluminium oxide ceramic target material suface indium coating method
Application Number: 03148177 Application Date: 2003.07.04
Publication Number: 1475465 Publication Date: 2004.02.18
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C04B41/89,C04B41/90
Applicant(s) Name: Tsinghua Univ. Address: 100084
Inventor(s) Name: Zhao Daqing
Attorney & Agent:
Abstract:
     A process for attaching an indium layer on the surface of zinc aluminium oxide ceramic target includes preparing silver slurry from silver oxide, 70-80 % wt, SiO2 10-15 % wt. and turpentine 10-20% wt, spraying it on the surface of said target, drying, heating at 550-580 deg.C for 15 min, cooling heating to 180-220 deg.C, spraying indium powder to smelt it. Its advantage is low cost.
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