Title: Point-of-use ammonia purification for electronic component manufacture
Application Number: 95197886 Application Date: 1995.06.05
Publication Number: 1186479 Publication Date: 1998.07.01
Approval Pub. Date: Granted Pub. Date: 2002.03.13
International Classifi-cation: C01C1/02,H01L21/00
Applicant(s) Name: Startec Ventures, Inc. Address:
Inventor(s) Name: J. G. Hoffman
Attorney & Agent: sun ai
Abstract:
     Highly purified ammonia for use in processes for the production of high-precision electronic components is prepared on-site by drawing ammonia vapor from a liquid ammonia reservoir, passing the vapor via a filter to filter out particles of less than 0.005 micron in size, and scrubbing the filtered vapor in a high-pH aqueous liquid-vapor contact unit.
Time: 6