| Title: | Method for calibrating space resolution ratio of high-resolution digital interference instrument | ||
| Application Number: | 200510027683 | Application Date: | 2005.07.12 |
| Publication Number: | 1710376 | Publication Date: | 2005.12.21 |
| Approval Pub. Date: | 2006.12.27 | Granted Pub. Date: | 2006.12.27 |
| International Classifi-cation: | G01B9/021,G03H1/04 | ||
| Applicant(s) Name: | Shanghai Optical Precision Mechanics Inst., Chines | Address: | 201800 |
| Inventor(s) Name: | Chen Jianwen, Gao Hongyi, Li Ruxin | ||
| Attorney & Agent: | zhang zechun | ||
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Abstract: |
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| A method for calibrating space resolution of digital interferometer includes setting up Mach- Zehnder interferometer and using CCD detector to shoot an interference pattern with carrier wave fringe , inserting phase sample with accuracy of lambda/ 10 in arm of said interferometer and shooting an interference pattern being modulated by sample , carrying Fourier transform for two patterns in computer separately and picking up phase data of two patterns , amplifying them after subtraction , picking up local area from amplified pattern and amplifying the phase difference for it. | |||
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| Time: | 9 | ||
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