Title: Method for producing nano-stamped template by laminated sided-wall technology
Application Number: 200510126492 Application Date: 2005.12.14
Publication Number: 1982202 Publication Date: 2007.06.20
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B81C1/00;G03F7/00;G03F7/12;G02B5/18;G03H1/04
Applicant(s) Name: Microelectronic Inst., Chinese Academy of Sciences Address:
Inventor(s) Name: Tu Deyu;Wang Congshun;Liu Ming
Attorney & Agent: duancheng yun
Abstract:
    A process for preparing a nano-class embossing template by multi-layer lateral wall technique includes such steps as depositing a structural film layer on a transparent substrate, depositing another material to form the second structural film layer, repeating said two steps according to the line design, polishing the surface of substrate by chemicomechanical flattening or grinding to obtain a lateral wall array consisting of alternative the first and second materials, and corroding or etching.
Time: 5