Title: Back-incidence quartz reflective polarizing beam-splitting grating and its preparing method
Application Number: 200610024490 Application Date: 2006.03.08
Publication Number: 1815275 Publication Date: 2006.08.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G02B5/18,G02B27/28,G03H1/04,G03F7/00
Applicant(s) Name: Shanghai Optical Precision Mechanics Inst., Chines Address: 201800
Inventor(s) Name: Zhou Changhe
Attorney & Agent: zhang zechun
Abstract:
     Being applicable to 800 Nano wave band, the grating possesses following specification: 356-364 Nano cycle, 1.015-1.025 micro etch depth, 1/2 duty ratio, extinction ratio larger than 100，reflective diffraction efficiency at 0 order of TE polarized light higher than 99.08％, reflective diffraction efficiency at 1 order of TM polarized light higher than 99.67％. The invention does not need to consider structure of grating grooves, to coat metal film or dielectric layer on the grating with high extinction ratio and reflection efficiency. Being as a kind of important polarized beam splitter, the disclosed grating can be produced in quantity and low cost by using technique of recording holographic grating, or electron beam write through device combined with microelectronic deep etch technique. Advantages are: stable and reliable performance.
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