Title: Metal ion reduction of aminochromatic chromophores and their use in synthesis of low metal bottom anti-reflective coatings for photoresists
Application Number: 97195252 Application Date: 1997.06.06
Publication Number: 1221497 Publication Date: 1999.06.30
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G03F7/09;H01L31/0216
Applicant(s) Name: Claryant International Co., Ltd. Address:
Inventor(s) Name: M. D. Rahman;T. T. Hannigan;T. J. Lynch
Attorney & Agent: chen jizhuang
Abstract:
    The present invention provides a process for producing bottom anti-reflective coating compositions having a very low level of metal ions utilizing specially treated anion exchange resins. The present invention also provides a method for producing semiconductor devices by producing photoimages on a substrate using such bottom anti-reflective coating compositions.
Time: 5