Title: Quasimolecule laser oscillation device and emission method, quasimolecule laser exposure device and laser tube
Application Number: 97119293 Application Date: 1997.07.18
Publication Number: 1190811 Publication Date: 1998.08.19
Approval Pub. Date: 2004.05.19 Granted Pub. Date: 2004.05.19
International Classifi-cation: G03F7/20;H01S3/00;H01S3/08;H01S3/22
Applicant(s) Name: Omi TAdahiro Address:
Inventor(s) Name: Omi Tadahiro;Tanaka Shingi;Hirayama Masaki
Attorney & Agent: jiang shixun
Abstract:
    This invention relates to an excimer laser oscillation apparatus which has a laser chamber which stores a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, and F2 gas, and in which an inner surface thereof has a reflection-free surface with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, an optical resonator which is made up of a pair of reflection mirrors arranged to sandwich the laser chamber therebetween, and in which the reflectance of the reflection mirror on the output side is more than 90% and microwave introduction means arranged on uper surface of the laser chamber, for continuously exciting the laser gas in the laser chamber.
Time: 7