Title: Light sensitive composition contg. arylhydrazo dye
Application Number: 97198409 Application Date: 1997.09.26
Publication Number: 1232551 Publication Date: 1999.10.20
Approval Pub. Date: 2002.12.25 Granted Pub. Date: 2002.12.25
International Classifi-cation: G03F7/09
Applicant(s) Name: Clariant International Ltd. Address:
Inventor(s) Name: Shuji Ding;Ping-Hung Lu;D. N. Khanna
Attorney & Agent: chen jizhuang
Abstract:
    A light-sensitive positive photoresist composition containing a film forming resin, a photoactive compound, a solvent, and an arylhydrazo dye. The dyed photoresist reduces the linewidth variation of the resist pattern on a reflective substrate while giving good lithographic performance.
Time: 9