Title: Radiation-sensitive composition adapted for roller coating
Application Number: 97125721 Application Date: 1997.12.26
Publication Number: 1191992 Publication Date: 1998.09.02
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G03F7/16;H01L21/30
Applicant(s) Name: Clariant International Ltd. Address:
Inventor(s) Name: Usuda Kenji
Attorney & Agent: wen qi
Abstract:
    A radiation-sensitive composition adapted for roller coating is disclosed, which contains, as a solvent for the composition, a mixed solvent of at least one member selected from the group consisting of propylene glycol alkyl ethers and propylene glycol diacetate having a boiling point of 170 to 250 DEG C, kinematic viscosity of 2 cSt or more at 25 DEG C and a relative evaporation rate of 10 or less taking the evaporation rate of n-butyl acetate as 100, and other solvent or solvents. This composition forms less uneven coating upon being coated on a substrate by roller coating.
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