Title: Photoactive coumarin sulfonate compound
Application Number: 98803148 Application Date: 1998.02.23
Publication Number: 1251585 Publication Date: 2000.04.26
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C07D311/74;C07D335/06;G03F7/023
Applicant(s) Name: Celanese Hoechst International Corp. Address:
Inventor(s) Name: M. Aslam;M. T. Sheehan;G. Kvakovszky
Attorney & Agent: sun ai
Abstract:
    A new class of 3-diazo-3,4-dihydrocoumarin compounds which are useful as photoactive compounds in a wide variety of applications including photoresists and other opto-electronic applications are disclosed and claimed. Preferred embodiments include 6-sulfonyl-3-diazo-4-oxo-3,4-dihydrocoumarin esters. These compounds exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.
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