| Title: | Positive photoresists contg. novel photoactive compounds | ||
| Application Number: | 98803145 | Application Date: | 1998.02.26 |
| Publication Number: | 1249824 | Publication Date: | 2000.04.05 |
| Approval Pub. Date: | Granted Pub. Date: | ||
| International Classifi-cation: | G03F7/004 | ||
| Applicant(s) Name: | Clariant International Ltd. | Address: | |
| Inventor(s) Name: | D. L. Durham;Ping-Hung Lu;J. E. Oberlander | ||
| Attorney & Agent: | chen jizhuang | ||
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Abstract: |
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| A light sensitive positive composition comprising an alkali soluble resin, a novel photoactive compound represented by structure (I) where X is O, S or N-R | |||
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| Time: | 10 | ||
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