Title: Positive photoresists contg. novel photoactive compounds
Application Number: 98803145 Application Date: 1998.02.26
Publication Number: 1249824 Publication Date: 2000.04.05
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G03F7/004
Applicant(s) Name: Clariant International Ltd. Address:
Inventor(s) Name: D. L. Durham;Ping-Hung Lu;J. E. Oberlander
Attorney & Agent: chen jizhuang
Abstract:
    A light sensitive positive composition comprising an alkali soluble resin, a novel photoactive compound represented by structure (I) where X is O, S or N-R
Time: 10
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