Title: Liquid sprayer
Application Number: 00101145 Application Date: 2000.01.21
Publication Number: 1307254 Publication Date: 2001.08.08
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05B3/18,B05B9/03,G03D5/04,G03F7/30
Applicant(s) Name: Daqi Science Address:
Inventor(s) Name:
Attorney & Agent: wang jinggang
Abstract:
     The liquid sprayer for cleaning, development, etching and other wet process includes a casing with hollow compartment, several conveying pipes set to the compartment vertically, several nozzles below the pipes a connector to drive the conveying pipes for spraying liquid toward the same direction, a driver to drive the connector to move in different direction, a horizontal pedestal inside the compartment for setting substrate.
Time: 7