Title: Use of mixed bases to enhance patterned resist profiles on chrome or sensitive substrates
Application Number: 200480041556 Application Date: 2004.02.11
Publication Number: 1914558 Publication Date: 2007.02.14
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G03C1/73;G03F7/039;G03F7/20;G03F7/30
Applicant(s) Name: IBM Address:
Inventor(s) Name: Moreau Wayne M;Angelopoulos Marie;Huang Wu-Song;Me
Attorney & Agent: liu menghai
Abstract:
    Resist compositions having good footing properties even on difficult substrates are obtained by using a combination of base additives including a room temperature solid base, and a liquid low vapor pressure base. The compositions are especially useful on metal substrates such as chromium-containing layers commonly used in mask-making.
Time: 8
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