Title: Removable optical pellicle
Application Number: 02817144 Application Date: 2002.07.26
Publication Number: 1552000 Publication Date: 2004.12.01
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G03B27/62
Applicant(s) Name: Micro Lithography Inc. Address:
Inventor(s) Name:
Attorney & Agent: zhang minhua
Abstract:
     optical pellicles (6) for photomasks (2) where the optical pellicle (6) is configured to be reversibly affixed to the photomask (2) with a non-adhesive mounting member, such as a vacuum system (7) or an electrostatic film (10). The optical pellicles (6) are readily removed from the photomask (2) and reattached without the use of adhesives, and are well-suited for used by automated methods.
Time: 8
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