Title: Technology for manufacturing flat display with film transistors
Application Number: 00128493 Application Date: 2000.11.24
Publication Number: 1355561 Publication Date: 2002.06.26
Approval Pub. Date: Granted Pub. Date: 2004.11.03
International Classifi-cation: G02F1/136,H01L21/84
Applicant(s) Name: Daqi Science and Technology Co Ltd Address:
Inventor(s) Name:
Attorney & Agent: chen xiaowen
Abstract:
     A technology for preparing flat display with thin-film transistors includes such steps as generating the first metal layer on glass substrate, yellow light etching to generate grid and pad electrodes, sequentially generating insulating layer, semiconductor layer and doped conducting silicon layer, second yellow light etching to limit active areas and connection windows, generating transparent conducting layer and the second metal layer, third yellow light etching to form sources and drains, generating protection layer, fourth yellow light etching and oxidizing reaction.
Time: 7
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