Title: Device and method for manufacture of liquid crystal display
Application Number: 00136495 Application Date: 2000.12.27
Publication Number: 1307326 Publication Date: 2001.08.08
Approval Pub. Date: 2005.04.06 Granted Pub. Date: 2005.04.06
International Classifi-cation: H01L21/00;G02F1/13
Applicant(s) Name: Mitsubishi Electric Corp. Address:
Inventor(s) Name: Kubo Tasuken;Omatsu Norikazu
Attorney & Agent: wang yonggang
Abstract:
    The invention provides a apparatus and a method of manufacturing a liquid crystal display where chemical contaminations due to contact with outside atmosphere can be avoided. The manufacturing apparatus comprises cleaning process chambers (1a, 1b), a film-forming process chamber (2) for forming a film on a layer cleaned in the cleaning process chamber, and outside air shielding and transfer means (3, 4) for transferring a substrate (11) from the cleaning process chamber to the film-forming process chamber, without exposing it to the outside air.
Time: 10