Title: Thin film actuated mirror array
Application Number: 95104755 Application Date: 1995.04.28
Publication Number: 1123916 Publication Date: 1996.06.05
Approval Pub. Date: 2001.04.04 Granted Pub. Date: 2001.04.04
International Classifi-cation: G02B27/18;G02F1/01
Applicant(s) Name: Daewoo Electronics Co., Ltd. Address:
Inventor(s) Name: Jung Beon Jee;Dong Goo Kim
Attorney & Agent: JIAN WEI
Abstract:
    A method for forming an array of MxN thin film actuated mirrors for use in an optical projection system comprises the steps of: (a) forming a sacrificial layer on top of an active matrix; (b) forming an array of MxN supporting members on the sacrificial layer; (c) depositing an elastic layer; (d) forming MxN conduits; (e) depositing a second thin film layer; (f) forming an electrodisplacive layer; (g) patterning the elastic layer, the second layer and the electrodisplacive layer to form an array of MxN semifinished actuated mirror structures; (h) heat treating the array of MxN semifinished actuated mirror structures; (i) depositing a first thin film layer on each of the semifinished actuated mirror structures to form an array of MxN actuated mirror structures; (j) covering each of the actuated mirror structures with a protection layer; and (k) removing the protection layer and the sacrificial layer to thereby form said array of MxN thin film actuated mirrors.
Time: 6
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