Title: Method of unsticking components of micro-mechanical devices
Application Number: 95105684 Application Date: 1995.06.20
Publication Number: 1149190 Publication Date: 1997.05.07
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G02B26/08
Applicant(s) Name: Texas Instruments Inc. Address:
Inventor(s) Name: Monte A. Douglas;Robert M. wallace
Attorney & Agent: CHEN WENQING
Abstract:
    A method of unsticking contacting elements (11, 17) of a micro-mechanical device (30). The device is exposed to either a low surface tension liquid with a surfactant (32) or to a supercritical fluid (62) so as to avoid damage to fragile components of the device (30). The exposure conditions are controlled so as to provide optimum results without damage to the device.
Time: 7