Title: Monolayer coating using molecular recognition for micromechanical devices
Application Number: 95105689 Application Date: 1995.06.28
Publication Number: 1120990 Publication Date: 1996.04.24
Approval Pub. Date: 2002.02.20 Granted Pub. Date: 2002.02.20
International Classifi-cation: B23Q11/00;G02B5/08;G02B26/08;H01H1/00
Applicant(s) Name: Texas Instruments Incorporated Address:
Inventor(s) Name: Robert M. Wallace;Bruce E. Gnade;Douglas A. Webb
Attorney & Agent: WU MINGHUA
Abstract:
    A method of forming of a monomolecular layer (monolayer) (19) for surfaces of contacting elements (17) of a micro-mechanical device (10). The method includes providing a coordinating substance on the surface of one of the contacting elements (13), then depositing a precursor substance (51) for formation of the monolayer (19). The coordinating substance (33) and the precursor substance (51) are chosen based on molecular recognition chemistry.
Time: 13
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