Title: Improved method for manufacturing an array of thin film actuated mirrors
Application Number: 95109991 Application Date: 1995.07.21
Publication Number: 1122005 Publication Date: 1996.05.08
Approval Pub. Date: 2000.10.11 Granted Pub. Date: 2000.10.11
International Classifi-cation: G02B26/08
Applicant(s) Name: Daewoo Electronics Co., Ltd. Address:
Inventor(s) Name: Dong Kuk Kim
Attorney & Agent: JIAN WEI
Abstract:
    An improved method for manufacturing an array of MxN thin film actuated mirrors comprises the steps of: providing an active matrix including MxN connecting terminals; constructing a thin film sacrificial layer on the top surface of the active matrix; removing portions of the thin film sacrificial layer surrounding each of the connecting terminals; forming a supporting member in each of the removed portions to thereby form a supporting layer; forming an elastic layer on top of the supporting layer; structuring a conduit in each of the supporting members and the elastic layer; depositing a second thin film layer on top of the elastic layer; forming a thin film electrodisplacive layer on top of the second thin film electrodes and the elastic layer; patterning the first thin film layer into MxN first thin film electrodes; and removing the thin film sacrificial layer to thereby form the array.
Time: 9
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