Title: Method for preparing coplanar grid anode tellurium-zinc-cadmium detector
Application Number: 200510023578 Application Date: 2005.01.26
Publication Number: 1648688 Publication Date: 2005.08.03
Approval Pub. Date: 2007.07.25 Granted Pub. Date: 2007.07.25
International Classifi-cation: G01T1/24;B24C1/08;C23C22/64;H01L21/47
Applicant(s) Name: Shanghai Univ. Address:
Inventor(s) Name: Song Wenbin;Wang Kunshu;Min Jiahua
Attorney & Agent: gu yonghua
Abstract:
    The present invention belongs to the field of semiconductor nuclear detector manufacture technology. The coplanar Te-Zn-Cd detector consists of Te-Zn-Cd crystal, anode and cathode. The preparation process of the detector includes the following steps: cutting crystal in (111) direction and certain size; surface treatment through polishing, surface chemical etching and cleaning; making electrodes including two coplanar interdigital anodes and one planar cathode through vacuum evaporation of Cr-Au alloy and deposition and photoetching, and leading out the electrodes with gold wire; and final surface deactivation. The detector of the present invention has excellent ray energy resolution.
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