Title: Method for measuring piezoelectric constant of thin film shaped piezoelectric material
Application Number: 97108713 Application Date: 1997.12.18
Publication Number: 1220399 Publication Date: 1999.06.23
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01R29/22
Applicant(s) Name: Daewoo Electronics Co., Ltd. Address:
Inventor(s) Name:
Attorney & Agent: li xiaoshu
Abstract:
     Method for measuring piezoelectric constant of thin film shaped piezoelectric material is disclosed. After forming thin film shaped piezoelectric material having bottom electrode and top electrode, microscope is placed above top electrode and height of displacement of thin film is measured. A pneumatic pressure is generated from pressing member and is applied to thin film. A charge generated from thin film is measured by charge measuring member. The piezoelectric constant of thin film shaped piezoelectric material is calculated by using measured charge and magnitude of applied pneumatic pressure. The piezoelectric constant can be measured by using pneumatic loading method and by applying uniform pneumatic pressure to whole surface of piezoelectric material regardless of topology of piezoelectric material, without causing short of plastic deformation.
Time: 15
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