Title: Optical driver, optical output type voltage sensor and IC tester using them
Application Number: 98803957 Application Date: 1998.02.05
Publication Number: 1252131 Publication Date: 2000.05.03
Approval Pub. Date: Granted Pub. Date: 2003.12.03
International Classifi-cation: G01R15/24,G01R19/00,G01R31/28
Applicant(s) Name: Advantest Corp. Address:
Inventor(s) Name:
Attorney & Agent: ma ying
Abstract:
     In an IC testing equipment constituted of a main frame which stores electronic circuit devices including a pattern generator, a waveform generator, and a logic comparator and a test head, an optically driven driver and an optical output type voltage sensor are installed at the test head side and, at the main frame side, test pattern signals outputted from the waveform generator are converted to optical signals by means of optical signal convertesrs, and the optical signals are transmitted to the head by means of optical waveguides to drive the optically driven driver mounted on the test head and then the optical signals are converted to an electrical signal, tested is given to the optical output type voltage sensor and then the optical output type voltage sensor transmits the voltage signal outputted from the IC to be tested as an optical signal, which is transmitted to the main frame. By this method, an IC testing equipment which is capable of rapid operation can be provided.
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