Title: Micro photo-electro-mechanical gyro
Application Number: 200610091039 Application Date: 2006.07.12
Publication Number: 1884972 Publication Date: 2006.12.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01C19/02,G01C19/42,G01P9/02
Applicant(s) Name: Beijing Institute of Technology Address: 100081
Inventor(s) Name: Chen Shufen, Zhao Yi, Fu Lei, Zou Zhengfeng
Attorney & Agent: fu leijie
Abstract:
     The invention relates to a device of testing the rotation angular speed, relating to the acoustic wave technique, especially providing a micro optical mechanical gyroscope, wherein it is formed by laser source, acoustic surface wave sensor, optical waveguide, electric optical modulator, detector and signal processing system; it is characterized in that: it uses refractive optical signal to measure the angular speed of gyroscope rotation; the interdigital transducer (IDT) generates acoustic surface wave to change the refractive index of medium to form density grid, to refract the optical transmitted in waveguide on the acoustic grid; since the matter will generate Ge force when rotation to change the frequency characteristic parameter of acoustic wave; and the detector receives the first refracted light, to read out the angular speed sensitive to the Ge force from the changes of light intensity and phase. The invention can resist to vibration and electromagnetic interference, with wide temperature application and higher accuracy then present MEMS gyroscope, to test the inertia test unit.
Time: 6
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