Title: (111) silicon based micro mechanical acceleration sensor and its manufacture
Application Number: 200610029423 Application Date: 2006.07.27
Publication Number: 1920576 Publication Date: 2007.02.28
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01P15/125
Applicant(s) Name: Zhejiang Duxiang Technological Co., Ltd. Address:
Inventor(s) Name: Yuan Donghai
Attorney & Agent: luo xiqun
Abstract:
    The invention relates to a micro mechanical acceleration sensor based on (111) silicon, and relative production, wherein said sensor is formed by one (111) single crystal silicon substrate and upper and lower substrates; the inertia quality of silicon substrate via at least one couple of flexible suspension beams of one substrate is connected to the fixed frame, to vertically move relative to the substrate via external acceleration, and change the capacitor between the plate electrodes of upper and lower substrates, to detect external acceleration. Said flexible suspension beams are symmetry relative to the (111) silicon substrate, while its size control and production are based on silicon chemical aeolotropism corrosion and height-depth-width ratio dry method etching technique; the (111) silicon substrate and upper and lower substrates are bonded by align bonds. The inventive sensor can realize closed detection, with controllable technique, high accuracy and the application with multi-axle integration.
Time: 5