Title: Mechanical quantity detecting element and mechanical quantity detecting device
Application Number: 200610141168 Application Date: 2006.10.13
Publication Number: 1948907 Publication Date: 2007.04.18
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01C19/56;G01P9/04
Applicant(s) Name: Toyota Motor Co., Ltd. Address:
Inventor(s) Name: Senda Hidemi
Attorney & Agent: wangan wu
Abstract:
    A mechanical quantity detecting element includes a main frame displaceably supported with respect to a substrate in an X axis direction parallel to a surface of the substrate, a transducer displaceably supported with respect to the main frame in a Y axis direction perpendicular to the X axis direction and parallel to the surface of the substrate, and a plurality of drive electrode portions which are provided on the main frame and drive the main frame in the X axis direction. The main frame includes a terminal portion where an end of the main frame extends in the Y axis direction, and at least one of the plurality of drive electrode portions is arranged on each side in the X axis direction of the terminal portion.
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