Title: Sensor block
Application Number: 200610143998 Application Date: 2006.11.07
Publication Number: 1964040 Publication Date: 2007.05.16
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01L25/00;H01L25/16;G01P15/00;G01J1/00
Applicant(s) Name: Mitutoyo Corp. Address:
Inventor(s) Name: Matsumiya Sadayuki;Tominaga Atsushi
Attorney & Agent: taofeng bei
Abstract:
    The present invention provides a sensor block, which comprises a plurality of sensor chips in combination. Each sensor chip includes a semiconductor substrate having a detection unit formed therein, and two glass substrates bonded to both sides of the semiconductor substrate. One of the glass substrates is shared among the sensor chips and serves as a base block to support the sensor chips.
Time: 6
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